Direct Bonded (Si/SiO2∥Si3N4/Si) SIO Wafer Pairs with Four-point Bending
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Korean Journal of Materials Research
سال: 2002
ISSN: 1225-0562
DOI: 10.3740/mrsk.2002.12.6.508